Inductively Coupled Plasma
An
inductively coupled plasma
(ICP) is a type of
plasma source
in which the
energy
is supplied by
electrical currents
which are produced by
electromagnetic induction
, that is, by time-varying
magnetic fields
.
Applications
ICP-MS
, a type of
mass spectrometry
.
*
ICP-RIE
, a type of
reactive ion etching
.
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